Research report 2006 - Max Planck Institute of Microstructure Physics

Atomic Layer Deposition (ALD)

Knez, Mato; Nielsch, Kornelius; Gösele, Ulrich

Experimentelle Abteilung II (Prof. Dr. Ulrich Gösele †)
MPI für Mikrostrukturphysik, Halle (Saale)

Nanostructures are in the focus of research in technology, medicine and biology. The Max Planck Institute of Microstructure Physics in Halle currently develops a major research project which deals with the deposition of thin inorganic films, biological, organic and inorganic nanostructures and the exploitation of such functionalized materials, for applications in medicine, electronics, catalysis, and sensing.

For the full text, see the German version.

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